TEL Tokyo Electron 847 Adhesion Plate Process Station ACT12 300mm Working Spare

Description

TEL Tokyo Electron 847 Adhesion Plate Process Station ACT12 300mm Working Spare
Inventory # A-17237
Part No: 847
Model No: Adhesion Plate Process Station
ADH SUB UNIT BASE ASSY
ADH PLATE SUPPORT ASSY
ADH PIN STAND ASSY
ADH CHAMBER ASSY
ADH ENCLOSER ASSY
ADH SHUTTER ASSY
Removed from a TEL Tokyo Electron Clean Track ACT12-300 300mm System
Parts List
Assembly Part No: 2985-429208-W4 BASE (ACT12-ADH) ASSY
1001 2910-207390-11 PLATE
1002 2910-200367-12 PLATE 1
1003 2910-401412-11 PLATE 2
1004 2910-401417-12 PLATE 2
1005 2910-401416-12 PLATE 2
1006 2910-401436-11 BRACKET 1
1007 2910-401415-11 BRACKET 1
1008 2903-200047-11 PLATE 1
1009 2910-301419-12 PLATE 1
1010 2910-101127-11 PLATE 1
1011 2910-101128-11 PLATE 1
1012 2910-100454-14 PLATE 1
1013 2910-201000-11 PLATE 1
1014 2910-200958-13 PLATE 1
1015 2910-100459-11 PLATE 1
1016 2910-401405-12 ARM 1
1017 2910-401390-13 ARM 1
1018 2910-305738-11 ARM 1
1019 2910-303693-11 PLATE 1
1020 2910-490019-11 POSITIONING PIN 1
1021 2903-300002-11 DUMPER 1
1022 2910-490167-12 SB. (S) 1
1023 2910-490168-11 SB. (P) 1
1024 2910-200956-11 ARM PLATE 1
1025 2910-490104-11 B.SPCR 4
1026 2910-490163-12 SSR.BRKT 1
1027 2910-400160-11 BRACKET 1
1028 2910-400161-12 COVER 1
1029 2910-401397-11 PLATE 1
1030 2910-400194-11 PLATE 1
1031 2902-400069-11 GUIDE 4
1032 2910-403392-11 BRACKET 1
1033 2910-305203-13 ARM STAND 1
1034 2910-305751-14 ARM STAND 1
1035 2910-404747-11 PLATE 1
1036 2910-414577-11 BLOCK,POSITION 2
1037 2910-412684-11 STOPPER 1
1038 2910-403391-11 BRACKET 1
1039 2910-401438-11 BRACKET 1
1040 2910-404405-11 PLATE 2
1041 2910-404203-11 BLOCK 1
1042 2910-490119-11 B.PLATE (1) 1
1043 2910-490120-11 B.PLATE (2) 1
1044 2910-490121-11 B.PLATE (3) 1
1045 2910-407544-11 POSITION PIN 2
1046 2910-407910-11 PLATE 2
1047 2910-414398-11 BLOCK 1
1048 2910-424967-11 BRAKCET 1 *Contact FE
1101 024-014400-1 AIR CYLINDER CDQ2B20D-J9742-50 (299880007911 1
1102 024-014398-1 AIR CYLINDER CDQ2B16D-J8597-20 (299880007911 1
1103 020-001438-1 WING BOLT M4*30 SUS304 2-TYPE FULL THD 1
1104 044-000057-1 SUPPORT,PCB ER-2 4
1105 044-000656-1 SUPPORT,PCB ER-4 5
1106 028-003338-1 FITTING,TUBE M-5HL-4 8
1107 024-012193-1 SPEED CONTROLLER INA-14-176 (199880070511 4
1108 012-004428-1 SOLENOID VALVE VV5J3-32-02-X556 (199880099811 1
1109 028-007016-1 FITTING,TUBE KJL04-01S 2
1110 020-001602-1 CAP SCREW M4*80 SUS304 2
1111 027-100943-1 RING,RETAINING O-TYPE FLUORINE D0270 AS568A-217 BLACK1
1112 028-002079-1 FITTING,RESIN S-PMU-W2YB (PF-112A 1
1113 028-002098-1 FITTING,RESIN S-UE-W2YB (PF-112A 2
1114 028-002284-1 FITTING,TUBE F900-PC-6.35 1
1115 028-002154-1 FITTING,TUBE F900-F-9.52*6.35 1
1116 028-002257-1 FITTING,TUBE F900-L-6.35 1
1117 017-002652-1 TUBE PFA-HG L 6.35*4.35-200*1000 1
1118 028-006361-1 FITTING,TUBE EUC6-TR 1
1119 028-002954-1 FITTING,TUBE M-5H-6 1
1120 028-008412-1 JOINT PARTS IN-233-463 GASKET (199880074211 1
1121 018-002172-1 LM GUIDE RSR9ZM+88LM 2
1122 018-002042-1 LM GUIDE RSR9ZM+73LM 1
Assembly Part No: 2986-400747-W4 12" AD SUB UNIT
2001 2981-600314-11 SUB UNIT CONN BOARD 1
2002 2986-400737-W4 12" SUB UNIT HEATER LINE ASSY 1
2003 2986-400738-11 12" PIN U/D SENSOR ASSY 1
2004 2986-400739-11 12" SHUTTER U/D SENSOR ASSY 1
2005 2986-441502-W2 SWITCH, PROXIMITY 12ADI #01 1
2006 2986-400741-W2 12" HP SOLENOID ASSY 1
2007 2986-402539-11 FUSE (7.5A) SET 1
2008 2986-403289-13 ADH VAC SENSOR ASSY 1
Assembly Part No: 2985-421432-W1 PLATE ASSY
3001 2910-200128-11 PLATE 1
Assembly Part No: 2985-403659-W6 ADH PLATE SUPPORT ASSY
1001 2910-200962-14 SUPPORT 1
1002 2910-303809-13 SUPPORT LEG 2
1003 2910-403501-11 P.SUPPORT 4
1004 2910-311347-11 FLANGE 1
1005 2910-403422-11 SEAL 1
1006 2910-303824-13 SEAL 1
1007 2910-437210-11 PACKING 1
1008 2910-420314-11 SEAL 1
1101 028-002124-1 FITTING,TUBE F900-AT-6.35A 6
1102 028-002257-1 FITTING,TUBE F900-L-6.35 5
1103 028-002302-1 FITTING,TUBE F900-T-6.35 5
1104 028-002967-1 FITTING,TUBE MS-5HLH-6 2 *Contact FE
1105 028-008412-1 JOINT PARTS IN-233-463 GASKET (199880074211 2
1106 028-002301-1 FITTING,TUBE F900-T-6 1
1107 028-006502-1 FITTING,TUBE F900-F-6.35*6 (U332431 1
1108 017-000215-1 TEFLON TUBE NO.9003-PTFE 6*4*1.0 1
1109 027-100996-1 RING,RETAINING O-TYPE VITON P-10A BLACK 1
Assembly Part No: 2985-403464-W1 ADH PIN STAND ASSY
1001 2910-310412-11 PIN STAND 1
1002 2910-403408-12 PIN 3
1003 2910-403409-11 STAND LOD 1
1004 2910-303692-11 STAND BASE 1
Assembly Part No: 2985-469054-W1 GUIDE (0.1-10) ASSY
2001 2910-409909-12 W.GUIDE (10) 6
2002 2910-411041-11 SPACER 6
2003 020-002965-1 COUNTERSUNK SCREW M2*5 1-TYPE 6
2004 910-413568-2 GAP PIN (0.1) WITH A STEP * 1
2005 021-000340-1 FOR HOLE C-RING RTW-6 SUS304 1
Assembly Part No: 2985-495600-W1 GUIDE (0.1-10) ASSY
3001 2910-409909-12 W.GUIDE (10) 6
3002 2910-411041-11 SPACER 6
3101 020-002965-1 COUNTERSUNK SCREW M2*5 1-TYPE 6
Assembly Part No: 2985-449883-W1 PLATE ASSY (ACT12-8-ADH)
4001 2985-091852-11 HP PLATE AT12-8-ADH-FCJ (299510089411 1
Assembly Part No: 2985-429209-W3 CHAMBER (ACT12-ADH) ASSY
1001 2910-202019-12 CHAMBER 1
1002 2910-303625-12 HOLD PLATE 1
1003 2910-202601-11 NOZZLE BLOCK 1
1004 2910-306822-11 NOZZLE 1
1005 2910-403375-11 BLOCK 1
1006 2910-404097-11 HANDLE BLOCK 2
1007 2910-403377-11 HANDLE BRACKET 1
1008 2910-403499-11 HANDLE BRACKET 1
1009 2910-311791-11 ARM 1
1010 2910-311792-11 ARM 1
1011 2910-403808-12 POSITION BLOCK 2
1012 2910-403239-11 POSITION PIN 2
1013 2910-409137-11 PIN 2
1014 2910-405396-11 NOZZLE PLATE 1
1016 2910-414578-11 BLOCK 1
1017 2910-414579-11 BLOCK 1
1018 2910-311793-11 PLATE 2
1019 2910-343927-11 TUBE 1 *Contact FE
1101 027-100545-1 RING,RETAINING O-TYPE VITON AS568-155 BLACK 2
1102 026-003220-1 HANDLE BG-10 SUS 2
1103 020-001148-1 CAP SCREW M10*15 SUS304 2
1104 021-100140-1 RING,RETAINING E-TYPE ETW-3 SUS304 2
1105 036-100504-1 MAGNET SENSOR RS-901M 1
1106 020-001838-1 COUNTERSUNK SCREW M4*20 SUS304 4 JISB1111
1107 020-002802-1 SET SCREW M4*20 SUS304 4 JISB1177
Assembly Part No: 2985-404096-W2 ADH ENCLOSER ASSY
1001 2910-309239-11 BOX COVER 1
1002 2910-302857-11 DUCT 1
1003 2910-406875-11 PLATE 1
1005 2910-401858-11 PLATE 1
1006 2910-401859-11 PLATE 1
1007 2910-401860-11 PLATE 1
1008 2910-401861-11 PLATE 1
1009 2910-401862-11 PLATE 1
1010 2910-406876-11 COVER 2
1101 028-002960-1 FITTING,TUBE M-5P 1
Assembly Part No: 2985-404623-W3 ADH SHUTTER ASSY
1001 2910-304574-13 SHUTTER 1
1002 2910-406961-11 SPACER 1
1003 2910-406647-11 PLATE 1
1005 2910-406648-11 PLATE 1
1006 2910-309213-11 BLOCK 1
Assembly Part No: 2985-485603-W2 SHUTTER ASSY, ADH
2001 2910-341473-11 SHUTTER 1
This TEL Tokyo Electron 847 Adhesion Plate Process Station is used working surplus. The heater cables on this item have been cut, see photos for details. The physical condition is good, but there are signs of previous use and handling.
Sale Details
Item Condition:
Used Working, 90 Day Warranty
Estimated Packed Shipping Dimensions:
L x W x H = 32"x24"x12" @ 80 lbs.
Only items pictured are included:
If a part is not pictured, or mentioned above, then it is not included in the sale. Pictured test equipment is not included or available for sale.
For items with multiple quantities:
The pictured item is not necessarily the one that will be sent. Serial numbers or country of manufacture may vary.
Items are sold with a
90-Day Satisfaction Guarantee
Lister 12